Inventor
MATSUNAGA JUNICHIRO
JP5 patents
Patents
5 patentsUS9607855B2Mar 28, 2017
Etching method and storage medium
TOKYO ELECTRON LTD2 citations70
US12054824B2Aug 6, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations60
US10312079B2Jun 4, 2019
Etching method
TOKYO ELECTRON LTD1 citations60
US11342192B2May 24, 2022
Substrate processing method and storage medium
TOKYO ELECTRON LTD1 citations58
US9691630B2Jun 27, 2017
Etching method
TOKYO ELECTRON LTD1 citations51