Inventor
QIN CE
US8 patents
⚠️ This page may combine multiple inventors who share the name “QIN CE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS9741563B2Aug 22, 2017
Hybrid stair-step etch
LAM RES CORP10 citations80
USRE46464EJul 4, 2017
Method for forming stair-step structures
LAM RES CORP0 citations50
US12165878B2Dec 10, 2024
Semiconductor mask reshaping using a sacrificial layer
LAM RES CORP0 citations48
US11646207B2May 9, 2023
Silicon oxide silicon nitride stack stair step etch
LAM RES CORP0 citations48
US11037784B2Jun 15, 2021
Amorphous carbon layer opening process
LAM RES CORP0 citations40