Inventor
DUSABLON MICHAEL S
US2 patents
Patents
2 patentsUS9673091B2Jun 6, 2017
Structure for BEOL metal levels with multiple dielectric layers for improved dielectric to metal adhesion
GLOBALFOUNDRIES INC2 citations67
US10163697B2Dec 25, 2018
Method for forming BEOL metal levels with multiple dielectric layers for improved dielectric to metal adhesion
GLOBALFOUNDRIES INC0 citations46