Inventor

LUTTIKHOF MARK JAN HENDRIK

NL2 patents

Patents

2 patents

US10429749B2Oct 1, 2019

Method of reducing effects of reticle heating and/or cooling in a lithographic process

ASML NETHERLANDS BV18 citations87

US10564555B2Feb 18, 2020

Method of reducing effects of reticle heating and/or cooling in a lithographic process

ASML NETHERLANDS BV1 citations55