Inventor

VASSILIEV VLADISLAV Y

SG3 patents

⚠️ This page may combine multiple inventors who share the name “VASSILIEV VLADISLAV Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

2 patents

US6027982AFeb 22, 2000

Method to form shallow trench isolation structures with improved isolation fill and surface planarity

CHARTERED SEMICONDUCTOR MFG57 citations94

US5876798AMar 2, 1999

Method of fluorinated silicon oxide film deposition

CHARTERED SEMICONDUCTOR MFG76 citations92

CHARTERED SEMICONDUCTOR MFG CO

1 patent

US6583069B1Jun 24, 2003

Method of silicon oxide and silicon glass films deposition

CHARTERED SEMICONDUCTOR MFG CO49 citations93