Inventor

SUZUKI MITUHIRO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SUZUKI MITUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI VIA MECHANICS LTD

1 patent

US7372478B2May 13, 2008

Pattern exposure method and pattern exposure apparatus

HITACHI VIA MECHANICS LTD6 citations58

OSHIDA YOSHITADA

1 patent

US8089614B2Jan 3, 2012

Device for changing pitch between light beam axes, and substrate exposure apparatus

OSHIDA YOSHITADA0 citations31