Inventor
DIERICHS MARCEL MATHIJS THEODORE MARIE
NL33 patents
⚠️ This page may combine multiple inventors who share the name “DIERICHS MARCEL MATHIJS THEODORE MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
19 patentsUS9134622B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations92
US10345712B2Jul 9, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9952515B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations84
US9581914B2Feb 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9134623B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7804574B2Sep 28, 2010
Lithographic apparatus and device manufacturing method using acidic liquid
ASML NETHERLANDS BV10 citations82
US9606448B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US7737425B2Jun 15, 2010
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV5 citations73
US8363208B2Jan 29, 2013
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US7894040B2Feb 22, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7808611B2Oct 5, 2010
Lithographic apparatus and device manufacturing method using acidic liquid
ASML NETHERLANDS BV3 citations61
US10146142B2Dec 4, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9442388B2Sep 13, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7763355B2Jul 27, 2010
Device manufacturing method, top coat material and substrate
ASML NETHERLANDS BV0 citations52
US7746445B2Jun 29, 2010
Lithographic apparatus, device manufacturing method and a substrate
ASML NETHERLANDS BV0 citations52
US9964858B2May 8, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US8027026B2Sep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7800079B2Sep 21, 2010
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
ASML NETHERLANDS BV0 citations49
US8345225B2Jan 1, 2013
Controllable radiation lithographic apparatus and method
ASML NETHERLANDS BV0 citations42
DIERICHS MARCEL MATHIJS THEODORE MARIE
6 patentsUS9025127B2May 5, 2015
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8953144B2Feb 10, 2015
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations83
US8629971B2Jan 14, 2014
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE9 citations83
US8252487B2Aug 28, 2012
Device manufacturing method and mask for use therein
DIERICHS MARCEL MATHIJS THEODORE MARIE6 citations71
US8279405B2Oct 2, 2012
Lithographic apparatus and device manufacturing method
DIERICHS MARCEL MATHIJS THEODORE MARIE0 citations51
US9188881B2Nov 17, 2015
Lithographic apparatus and method for reducing stray radiation
DIERICHS MARCEL MATHIJS THEODORE MARIE0 citations39
STREEFKERK BOB
3 patentsUS8634056B2Jan 21, 2014
Lithographic apparatus and device manufacturing method
STREEFKERK BOB10 citations92
US8547519B2Oct 1, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB8 citations84
US8416385B2Apr 9, 2013
Lithographic apparatus and device manufacturing method
STREEFKERK BOB0 citations50