Inventor
LIPSON MATTHEW
US37 patents
⚠️ This page may combine multiple inventors who share the name “LIPSON MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
14 patentsUS10001713B2Jun 19, 2018
Lithographic apparatus and method
ASML HOLDING NV7 citations83
US7423732B2Sep 9, 2008
Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane
ASML HOLDING NV8 citations73
US7678458B2Mar 16, 2010
Bonding silicon silicon carbide to glass ceramics
ASML HOLDING NV6 citations71
US12111581B2Oct 8, 2024
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV2 citations67
US10310391B2Jun 4, 2019
Electrostatic clamp and a method for manufacturing the same
ASML HOLDING NV3 citations66
US7781029B2Aug 24, 2010
Side seal for wet lens elements
ASML HOLDING NV6 citations66
US7180573B2Feb 20, 2007
System and method to block unwanted light reflecting from a pattern generating portion from reaching an object
ASML HOLDING NV6 citations61
US10908518B2Feb 2, 2021
Lithographic apparatus and method
ASML HOLDING NV0 citations60
US11016401B2May 25, 2021
Substrates and methods of using those substrates
ASML HOLDING NV0 citations59
US12529967B2Jan 20, 2026
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV0 citations57
US11988971B2May 21, 2024
Lithographic apparatus, substrate table, and method
ASML HOLDING NV0 citations53
US11520241B2Dec 6, 2022
Lithography supports with defined burltop topography
ASML HOLDING NV0 citations53
US7335398B2Feb 26, 2008
Method to modify the spatial response of a pattern generator
ASML HOLDING NV1 citations51
US12189310B2Jan 7, 2025
Systems and methods for manufacturing a double-sided electrostatic clamp
ASML HOLDING NV0 citations50
ASML NETHERLANDS BV
8 patentsUS10558129B2Feb 11, 2020
Mask assembly
ASML NETHERLANDS BV7 citations82
US9606448B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US7894040B2Feb 22, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US11009803B2May 18, 2021
Mask assembly
ASML NETHERLANDS BV0 citations60
US10146142B2Dec 4, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9442388B2Sep 13, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US8045135B2Oct 25, 2011
Lithographic apparatus with a fluid combining unit and related device manufacturing method
ASML NETHERLANDS BV1 citations52
US8027026B2Sep 27, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
LIPSON MATTHEW
3 patentsUS8168017B2May 1, 2012
Bonding silicon silicon carbide to glass ceramics
LIPSON MATTHEW2 citations58
US8755027B2Jun 17, 2014
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid
LIPSON MATTHEW0 citations48
US9195148B2Nov 24, 2015
Side seal for wet lens elements
LIPSON MATTHEW0 citations43
SIROS TECHNOLOGIES INC
2 patentsCALIFORNIA INST OF TECHN
2 patentsUS6608228B1Aug 19, 2003
Two-photon or higher-order absorbing optical materials for generation of reactive species
CALIFORNIA INST OF TECHN61 citations95
US7235194B2Jun 26, 2007
Two-photon or higher-order absorbing optical materials for generation of reactive species
CALIFORNIA INST OF TECHN11 citations83