Inventor
UITTERDIJK TAMMO
NL36 patents
⚠️ This page may combine multiple inventors who share the name “UITTERDIJK TAMMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
18 patentsUS7405805B2Jul 29, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV25 citations90
US7375799B2May 20, 2008
Lithographic apparatus
ASML NETHERLANDS BV24 citations89
US7580113B2Aug 25, 2009
Method of reducing a wave front aberration, and computer program product
ASML NETHERLANDS BV12 citations81
US7379154B2May 27, 2008
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
ASML NETHERLANDS BV9 citations77
US9606448B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US7924403B2Apr 12, 2011
Lithographic apparatus and device and device manufacturing method
ASML NETHERLANDS BV3 citations63
US7535644B2May 19, 2009
Lens element, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations63
US7372633B2May 13, 2008
Lithographic apparatus, aberration correction device and device manufacturing method
ASML NETHERLANDS BV4 citations62
US8013978B2Sep 6, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7843552B2Nov 30, 2010
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
ASML NETHERLANDS BV5 citations60
US7538875B2May 26, 2009
Lithographic apparatus and methods for use thereof
ASML NETHERLANDS BV2 citations59
US12235592B2Feb 25, 2025
Object holder, electrostatic sheet and method for making an electrostatic sheet
ASML NETHERLANDS BV0 citations56
US10146142B2Dec 4, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9442388B2Sep 13, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US8045134B2Oct 25, 2011
Lithographic apparatus, control system and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7538952B2May 26, 2009
Lithographic apparatus, aberration correction device and device manufacturing method
ASML NETHERLANDS BV1 citations51
US9170498B2Oct 27, 2015
Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor
ASML NETHERLANDS BV0 citations49
ASML HOLDING NV
12 patentsUS10001713B2Jun 19, 2018
Lithographic apparatus and method
ASML HOLDING NV7 citations83
US10324383B2Jun 18, 2019
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
ASML HOLDING NV5 citations79
US12111581B2Oct 8, 2024
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV2 citations67
US10310391B2Jun 4, 2019
Electrostatic clamp and a method for manufacturing the same
ASML HOLDING NV3 citations66
US12393126B2Aug 19, 2025
Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer
ASML HOLDING NV0 citations62
US7136152B2Nov 14, 2006
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle
ASML HOLDING NV2 citations61
US10908518B2Feb 2, 2021
Lithographic apparatus and method
ASML HOLDING NV0 citations60
USRE49066EMay 10, 2022
Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
ASML HOLDING NV0 citations59
US12529967B2Jan 20, 2026
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV0 citations57
US11270906B2Mar 8, 2022
Burls with altered surface topography for holding an object in lithography applications
ASML HOLDING NV1 citations56
US12560872B2Feb 24, 2026
Vacuum sheet bond fixturing and flexible burl applications for substrate tables
ASML HOLDING NV0 citations54
US11988971B2May 21, 2024
Lithographic apparatus, substrate table, and method
ASML HOLDING NV0 citations53