Inventor

OTAKI YOSHIYUKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OTAKI YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAI KYOKUYO

1 patent

US8625111B2Jan 7, 2014

Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter

SAI KYOKUYO1 citations37

HINATA YOHEI

1 patent

US10415135B2Sep 17, 2019

Thin film formation method and thin film formation apparatus

HINATA YOHEI0 citations25