Inventor
IWATA KATSUYUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “IWATA KATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA CERAMICS CO
6 patentsUS6059885AMay 9, 2000
Vapor deposition apparatus and method for forming thin film
TOSHIBA CERAMICS CO290 citations98
US6113705ASep 5, 2000
High-speed rotational vapor deposition apparatus and high-speed rotational vapor deposition thin film method
TOSHIBA CERAMICS CO68 citations95
US6025596AFeb 15, 2000
Method for measuring epitaxial film thickness of multilayer epitaxial wafer
TOSHIBA CERAMICS CO21 citations88
US6132519AOct 17, 2000
Vapor deposition apparatus and vapor deposition method
TOSHIBA CERAMICS CO3 citations61
US6461428B2Oct 8, 2002
Method and apparatus for controlling rise and fall of temperature in semiconductor substrates
TOSHIBA CERAMICS CO6 citations60
US6485573B2Nov 26, 2002
Apparatus for reduced-pressure epitaxial growth and method of controlling the apparatus
TOSHIBA CERAMICS CO0 citations39