Inventor
ODLE JESSE QUINN
US5 patents
Patents
5 patentsUS9778022B1Oct 3, 2017
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV22 citations90
US10048199B1Aug 14, 2018
Metrology system for an extreme ultraviolet light source
ASML NETHERLANDS BV12 citations79
US10605588B2Mar 31, 2020
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV2 citations69
US10794683B2Oct 6, 2020
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations48
US10429173B2Oct 1, 2019
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations48