Inventor
FERNANDEZ-ESPASA CÈSAR
US5 patents
⚠️ This page may combine multiple inventors who share the name “FERNANDEZ-ESPASA CÈSAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS9778022B1Oct 3, 2017
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV22 citations90
US10605588B2Mar 31, 2020
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV2 citations69
US10794683B2Oct 6, 2020
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations48
US10429173B2Oct 1, 2019
Determining moving properties of a target in an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations48