Inventor
HAN MIN-SEOG
KR3 patents
Patents
3 patentsUS5476807ADec 19, 1995
Method for forming fine patterns in a semiconductor device
SAMSUNG ELECTRONICS CO LTD21 citations91
US6013549AJan 11, 2000
DRAM cell capacitor and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD17 citations90
US6215143B1Apr 10, 2001
DRAM cell capacitor having hemispherical grain silicon on a selected portion of a storage node
SAMSUNG ELECTRONICS CO LTD3 citations60