Inventor
HALTER THOMAS
CH2 patents
Patents
2 patentsUS7138343B2Nov 21, 2006
Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
OC OERLIKON BALZERS AG7 citations69
US7429543B2Sep 30, 2008
Method for the production of a substrate
OC OERLIKON BALZERS AG0 citations48