P

Inventor

SCHWAB BRENT D

US4 patents
⚠️ This page may combine multiple inventors who share the name “SCHWAB BRENT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FSI INT INC

3 patents
US5922219AJul 13, 1999

UV/halogen treatment for dry oxide etching

FSI INT INC22 citations90
US6835667B2Dec 28, 2004

Method for etching high-k films in solutions comprising dilute fluoride species

FSI INT INC24 citations88
US7425505B2Sep 16, 2008

Use of silyating agents

FSI INT INC2 citations59

TEL FSI INC

1 patent
US10748788B2Aug 18, 2020

System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays

TEL FSI INC0 citations34