Inventor
PEN HERMEN FOLKEN
NL6 patents
Patents
6 patentsUS7426011B2Sep 16, 2008
Method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7423725B2Sep 9, 2008
Lithographic method
ASML NETHERLANDS BV5 citations60
US12443115B2Oct 14, 2025
Measurement system and method for characterizing a patterning device
ASML NETHERLANDS BV0 citations47
US11009800B2May 18, 2021
Measurement system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations45
US11237490B2Feb 1, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations44
US8345231B2Jan 1, 2013
Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process
ASML NETHERLANDS BV0 citations39