Inventor
KRUIZINGA BORGERT
NL18 patents
⚠️ This page may combine multiple inventors who share the name “KRUIZINGA BORGERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS6778257B2Aug 17, 2004
Imaging apparatus
ASML NETHERLANDS BV953 citations97
US6498351B1Dec 24, 2002
Illumination system for shaping extreme ultraviolet radiation used in a lithographic projection apparatus
ASML NETHERLANDS BV63 citations93
US7023525B2Apr 4, 2006
Imaging apparatus
ASML NETHERLANDS BV13 citations82
US7282701B2Oct 16, 2007
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV12 citations81
US9823572B2Nov 21, 2017
Lithographic method
ASML NETHERLANDS BV2 citations71
US7453078B2Nov 18, 2008
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV8 citations71
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US7969549B2Jun 28, 2011
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
ASML NETHERLANDS BV4 citations61
US11009800B2May 18, 2021
Measurement system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations45