Inventor

IWASHITA KATSUHIRO

JP3 patents

Patents

3 patents

US4675096AJun 23, 1987

Continuous sputtering apparatus

HITACHI LTD58 citations95

US6460755B1Oct 8, 2002

Bump forming method and apparatus therefor

HITACHI LTD82 citations94

US4420233ADec 13, 1983

Projecting apparatus

HITACHI LTD26 citations81