Inventor
CHEN MEI-CHEN
TW3 patents
Patents
3 patentsUS9653404B1May 16, 2017
Overlay target for optically measuring overlay alignment of layers formed on semiconductor wafer
UNITED MICROELECTRONICS CORP10 citations80
US9530646B2Dec 27, 2016
Method of forming a semiconductor structure
UNITED MICROELECTRONICS CORP0 citations51
US9373505B2Jun 21, 2016
Mark segmentation method and method for manufacturing a semiconductor structure applying the same
UNITED MICROELECTRONICS CORP0 citations46