Inventor
INAGAKI YUKIHIKO
JP29 patents
⚠️ This page may combine multiple inventors who share the name “INAGAKI YUKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
11 patentsUS9993840B2Jun 12, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD7 citations84
US10112205B2Oct 30, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD6 citations73
US9956565B2May 1, 2018
Substrate treating apparatus
SCREEN HOLDINGS CO LTD3 citations73
US10651056B2May 12, 2020
Treating liquid vaporizing apparatus
SCREEN HOLDINGS CO LTD1 citations62
US10286648B2May 14, 2019
Peripheral portion processing device and peripheral portion processing method
SCREEN HOLDINGS CO LTD1 citations62
US11152233B2Oct 19, 2021
Substrate treating apparatus and substrate treating method
SCREEN HOLDINGS CO LTD1 citations59
US10573546B2Feb 25, 2020
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations52
US11495476B2Nov 8, 2022
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations49
US11101156B2Aug 24, 2021
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations49
US10784125B2Sep 22, 2020
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations41
US10269598B2Apr 23, 2019
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations41
DAINIPPON SCREEN MFG
7 patentsUS6893171B2May 17, 2005
Substrate treating apparatus
DAINIPPON SCREEN MFG131 citations98
US6558053B2May 6, 2003
Substrate processing apparatus
DAINIPPON SCREEN MFG63 citations95
US6814507B2Nov 9, 2004
Substrate treating apparatus
DAINIPPON SCREEN MFG35 citations92
US6752543B2Jun 22, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG38 citations92
US5592324AJan 7, 1997
Cylindrical inner surface scanner and imaging control method in cylindrical inner surface scanner
DAINIPPON SCREEN MFG16 citations73
US5200849AApr 6, 1993
Light beam scanning system
DAINIPPON SCREEN MFG10 citations73
US4942460AJul 17, 1990
Method of and apparatus for recording a halftone dot color image on a color photosensitive material
DAINIPPON SCREEN MFG6 citations61
INAGAKI YUKIHIKO
5 patentsUS8827621B2Sep 9, 2014
Substrate processing apparatus, storage device, and method of transporting substrate storing container
INAGAKI YUKIHIKO9 citations80
US9728434B2Aug 8, 2017
Substrate processing apparatus, storage device, and method of transporting substrate storing container
INAGAKI YUKIHIKO4 citations69
US9566598B2Feb 14, 2017
Substrate processing apparatus and substrate processing method
INAGAKI YUKIHIKO1 citations51
US9343339B2May 17, 2016
Coating method and coating apparatus
INAGAKI YUKIHIKO1 citations50
US9553007B2Jan 24, 2017
Coating method and coating apparatus
INAGAKI YUKIHIKO0 citations40
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD
3 patentsUS10047441B2Aug 14, 2018
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD1 citations62
US10201824B2Feb 12, 2019
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51
US9828676B2Nov 28, 2017
Substrate processing apparatus and substrate processing method
SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51