Inventor

MURAI SEIJI

JP4 patents

Patents

4 patents

US11152233B2Oct 19, 2021

Substrate treating apparatus and substrate treating method

SCREEN HOLDINGS CO LTD1 citations59

US11075101B2Jul 27, 2021

Indexer apparatus, substrate treating apparatus, method for controlling indexer apparatus, and method for controlling substrate treating apparatus

SCREEN HOLDINGS CO LTD1 citations58

US11101156B2Aug 24, 2021

Substrate treating apparatus

SCREEN HOLDINGS CO LTD0 citations49

US11152242B2Oct 19, 2021

Substrate treating apparatus and method for controlling substrate treating apparatus

SCREEN HOLDINGS CO LTD0 citations47