Inventor

CHOI YOUNGSEOP

KR4 patents

Patents

4 patents

US11794220B2Oct 24, 2023

Fluid supply unit and substrate treating apparatus having the same

SEMES CO LTD2 citations68

US11721575B2Aug 8, 2023

Substrate support unit and substrate treating apparatus having the same

SEMES CO LTD2 citations68

US11923219B2Mar 5, 2024

Apparatus for treating substrate

SEMES CO LTD0 citations58

US12027381B2Jul 2, 2024

Apparatus for treating substrate and method for treating substrate

SEMES CO LTD0 citations49