Inventor · disambiguated record
Chiun-Da Shiue
Also filed as: SHIUE CHIUN-DA
2 granted patents·4 pending applications·0 citations·filing 2010–2024
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6 records- 0180US2024384401A1Multilayer ald coating for critical components in process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0274US12049697B2Multilayer ALD coating for critical components in process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 30, 2024·0 cites·20 claims
- 0362US2025149302A1Anti-plasma coatingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0457US2025246390A1Sealing articles for plasma resistance applicationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0556US2025237944A1Anti-slip compositions and components for semiconductor wafer handling systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0636US8709570B2Near-field optical disk having surface plasmon amplification by stimulated emission of radiationTSAI DIN-PING·Filed 2010·Granted Apr 29, 2014·0 cites·18 claims
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