Inventor

AYDIL ERAY S

US3 patents

⚠️ This page may combine multiple inventors who share the name “AYDIL ERAY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AT & T BELL LAB

2 patents

US5413954AMay 9, 1995

Method of making a silicon-based device comprising surface plasma cleaning

AT & T BELL LAB27 citations89

US5277752AJan 11, 1994

Method for controlling plasma processes

AT & T BELL LAB12 citations65

AT & T CORP

1 patent

US5464664ANov 7, 1995

Downstream ammonia plasma passivation of GaAs

AT & T CORP10 citations71