Inventor
DE GROOT TON
NL3 patents
Patents
3 patentsUS7446850B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations70
US6815699B2Nov 9, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US7764356B2Jul 27, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations59