P

Inventor

KAMBARA HIROMITSU

JP5 patents
⚠️ This page may combine multiple inventors who share the name “KAMBARA HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US6852584B1Feb 8, 2005

Method of trimming a gate electrode structure

TOKYO ELECTRON LTD134 citations96
US7396431B2Jul 8, 2008

Plasma processing system for treating a substrate

TOKYO ELECTRON LTD50 citations89
US7709397B2May 4, 2010

Method and system for etching a high-k dielectric material

TOKYO ELECTRON LTD1 citations50

TEL MFG AND ENGINEERING OF AMERICA INC

2 patents
US11694872B2Jul 4, 2023

Pattern enhancement using a gas cluster ion beam

TEL MFG AND ENGINEERING OF AMERICA INC1 citations68
US11450506B2Sep 20, 2022

Pattern enhancement using a gas cluster ion beam

TEL MFG AND ENGINEERING OF AMERICA INC0 citations57