Inventor
GWINN MATTHEW
US7 patents
Patents
7 patentsUS11694872B2Jul 4, 2023
Pattern enhancement using a gas cluster ion beam
TEL MFG AND ENGINEERING OF AMERICA INC1 citations68
US11450506B2Sep 20, 2022
Pattern enhancement using a gas cluster ion beam
TEL MFG AND ENGINEERING OF AMERICA INC0 citations57
US11915906B2Feb 27, 2024
Wafer scanning apparatus and method for focused beam processing
TEL MFG AND ENGINEERING OF AMERICA INC0 citations52
US11587760B2Feb 21, 2023
Wafer scanning apparatus and method for focused beam processing
TEL MFG AND ENGINEERING OF AMERICA INC0 citations52
US12334348B2Jun 17, 2025
Substrate scanning apparatus with pendulum and rotatable substrate holder
TEL MFG AND ENGINEERING OF AMERICA INC0 citations47
US12593646B2Mar 31, 2026
Automated fault detection in microfabrication
TEL MFG AND ENGINEERING OF AMERICA INC0 citations46
US11715620B2Aug 1, 2023
Tuning gas cluster ion beam systems
TEL MFG AND ENGINEERING OF AMERICA INC0 citations40