Inventor
COX DAMON
US3 patents
Patents
3 patentsUS6582175B2Jun 24, 2003
Robot for handling semiconductor wafers
APPLIED MATERIALS INC26 citations90
US6379095B1Apr 30, 2002
Robot for handling semiconductor wafers
APPLIED MATERIALS INC34 citations89
US11823937B2Nov 21, 2023
Calibration of an aligner station of a processing system
APPLIED MATERIALS INC3 citations70