Inventor
ELLIOTT MARTIN R
US60 patents
⚠️ This page may combine multiple inventors who share the name “ELLIOTT MARTIN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
37 patentsUS7234584B2Jun 26, 2007
System for transporting substrate carriers
APPLIED MATERIALS INC86 citations98
US6955197B2Oct 18, 2005
Substrate carrier having door latching and substrate clamping mechanisms
APPLIED MATERIALS INC73 citations98
US7243003B2Jul 10, 2007
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC65 citations97
US7409263B2Aug 5, 2008
Methods and apparatus for repositioning support for a substrate carrier
APPLIED MATERIALS INC44 citations96
US7156221B2Jan 2, 2007
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC27 citations96
US7527141B2May 5, 2009
System for transporting substrate carriers
APPLIED MATERIALS INC20 citations93
US7299831B2Nov 27, 2007
Substrate carrier having door latching and substrate clamping mechanisms
APPLIED MATERIALS INC20 citations93
US7293642B2Nov 13, 2007
Methods and apparatus for transporting substrate carriers
APPLIED MATERIALS INC16 citations93
US7221993B2May 22, 2007
Systems and methods for transferring small lot size substrate carriers between processing tools
APPLIED MATERIALS INC43 citations93
US7168553B2Jan 30, 2007
Dynamically balanced substrate carrier handler
APPLIED MATERIALS INC24 citations93
US7792608B2Sep 7, 2010
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC21 citations92
US7433756B2Oct 7, 2008
Calibration of high speed loader to substrate transport system
APPLIED MATERIALS INC34 citations92
US7359767B2Apr 15, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC33 citations92
US7346431B2Mar 18, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
APPLIED MATERIALS INC27 citations92
US7230702B2Jun 12, 2007
Monitoring of smart pin transition timing
APPLIED MATERIALS INC39 citations92
US7258520B2Aug 21, 2007
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
APPLIED MATERIALS INC34 citations90
US6582175B2Jun 24, 2003
Robot for handling semiconductor wafers
APPLIED MATERIALS INC26 citations90
US6379095B1Apr 30, 2002
Robot for handling semiconductor wafers
APPLIED MATERIALS INC34 citations89
US7720558B2May 18, 2010
Methods and apparatus for mapping carrier contents
APPLIED MATERIALS INC8 citations84
US7684895B2Mar 23, 2010
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
APPLIED MATERIALS INC10 citations84
US7673735B2Mar 9, 2010
System for transporting substrate carriers
APPLIED MATERIALS INC15 citations84
US7611319B2Nov 3, 2009
Methods and apparatus for identifying small lot size substrate carriers
APPLIED MATERIALS INC10 citations84
US7506746B2Mar 24, 2009
System for transporting substrate carriers
APPLIED MATERIALS INC12 citations84
US7711445B2May 4, 2010
Systems and methods for transferring small lot size substrate carriers between processing tools
APPLIED MATERIALS INC5 citations74
US7552816B2Jun 30, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC3 citations74
US7506747B2Mar 24, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC6 citations74
US7503448B2Mar 17, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC6 citations74
US7455172B2Nov 25, 2008
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC4 citations74
US7367446B2May 6, 2008
Methods and apparatus for transporting substrate carriers
APPLIED MATERIALS INC5 citations74
US7984543B2Jul 26, 2011
Methods for moving a substrate carrier
APPLIED MATERIALS INC2 citations63
US7914248B2Mar 29, 2011
Methods and apparatus for repositioning support for a substrate carrier
APPLIED MATERIALS INC3 citations63
US7857570B2Dec 28, 2010
Method and apparatus for supplying substrates to a processing tool
APPLIED MATERIALS INC5 citations63
US7798309B2Sep 21, 2010
Stabilizing substrate carriers during overhead transport
APPLIED MATERIALS INC3 citations63
US7578647B2Aug 25, 2009
Load port configurations for small lot size substrate carriers
APPLIED MATERIALS INC4 citations63
US7540371B2Jun 2, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC2 citations63
US7506752B2Mar 24, 2009
Methods and apparatus for transporting substrate carriers
APPLIED MATERIALS INC2 citations63
US7912576B2Mar 22, 2011
Calibration of high speed loader to substrate transport system
APPLIED MATERIALS INC4 citations62
SHAH VINAY K
2 patentsALERT INNOVATION INC
2 patentsWALMART APOLLO LLC
2 patentsBROOKS AUTOMATION INC
2 patentsAPPLIED MATERIAL INC
1 patentKRUPYSHEV ALEXANDER G
1 patentPPG INDUSTRIES INC
1 patentAPPLIED MATRIALS INC
1 patentSYMBOTIC LLC
1 patentShowing the top 50 of 60 patents by PatentIndex Score.