Inventor
OTANI TOMONORI
JP12 patents
Patents
12 patentsUS10829644B2Nov 10, 2020
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
CANON KK5 citations72
US10754244B2Aug 25, 2020
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
CANON KK6 citations72
US10754245B2Aug 25, 2020
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
CANON KK5 citations72
US10073341B2Sep 11, 2018
Adhesion layer composition, method for forming film by nanoimprinting, methods for manufacturing optical component, circuit board and electronic apparatus
CANON KK4 citations71
US10395943B2Aug 27, 2019
Patterning method, method for producing processed substrate, method for producing optical component, method for producing circuit board, and method for producing electronic component
CANON KK1 citations60
US11709430B2Jul 25, 2023
Method for manufacturing cured product pattern, method for manufacturing processed substrate, method for manufacturing circuit board, method for manufacturing electronic component, and method for manufacturing imprint mold
CANON KK0 citations57
US11561468B2Jan 24, 2023
Pattern forming method
CANON KK0 citations51
US11376766B2Jul 5, 2022
Pattern forming method
CANON KK0 citations51
US11327397B2May 10, 2022
Pattern forming method, coating material for imprint pretreatment and substrate pretreatment method
CANON KK0 citations51
US11281097B2Mar 22, 2022
Method for forming pattern by using photo-nanoimprint technology, imprint apparatus, and curable composition
CANON KK0 citations51
US11003073B2May 11, 2021
Photocurable composition for imprint, method for producing film using the same, method for producing optical component using the same, method for producing circuit board using the same, and method for producing electronic component using the same
CANON KK0 citations50
US10533065B2Jan 14, 2020
Photocurable composition, method for producing cured product pattern using the same, method for producing optical component, and method for producing circuit board
CANON KK0 citations50