Inventor
JASCHINSKY PHILIPP
DE2 patents
Patents
2 patentsUS9798244B2Oct 24, 2017
Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity
GLOBALFOUNDRIES INC0 citations33
US9966315B2May 8, 2018
Advanced process control methods for process-aware dimension targeting
GLOBALFOUNDRIES INC0 citations32