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Inventor
OGATA Kento
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “OGATA Kento”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US11273464B2
Mar 15, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD
10 citations
82
KOBE STEEL LTD
1 patent
US11079072B2
Aug 3, 2021
Gas supply system, vehicle, and hydrogen supply facility
KOBE STEEL LTD
0 citations
46