Inventor

HUDGENS JEFFREY C

US117 patents

⚠️ This page may combine multiple inventors who share the name “HUDGENS JEFFREY C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUDGENS JEFFREY C

APPLIED MATERIALS INC

System for transporting substrate carriers

Substrate carrier having door latching and substrate clamping mechanisms

Substrate carrier handler that unloads substrate carriers directly from a moving conveyor

Break-away positioning conveyor mount for accommodating conveyor belt bends

Method for determining a position of a robot

Mechanically clamping robot wrist

Mechanically clamping robot wrist

Substrate processing systems and robot apparatus for transporting substrates in electronic device manufacturing

Method for determining a position of a robot

Multi-axis vacuum motor assembly

System for transporting substrate carriers

Substrate carrier having door latching and substrate clamping mechanisms

Methods and apparatus for transporting substrate carriers

Systems and methods for transferring small lot size substrate carriers between processing tools

Dynamically balanced substrate carrier handler

Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing

Methods and apparatus for extending the reach of a dual scara robot linkage

Cartesian cluster tool configuration for lithography type processes

Substrate carrier handler that unloads substrate carriers directly from a moving conveyor

Calibration of high speed loader to substrate transport system

Substrate carrier handler that unloads substrate carriers directly from a moving conveyor

Substrate carrier handler that unloads substrate carriers directly from a moving conveyer

Monitoring of smart pin transition timing

Robot blade for semiconductor processing equipment

Wafer handling systems and methods

Methods and apparatus for electronic device manufacturing system monitoring and control

Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing

Robot for handling semiconductor wafers

Robot for handling semiconductor wafers

Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing

Electronic device manufacturing system

Robot systems, apparatus, and methods having independently rotatable waists

Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm

Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems with web extending from hub

Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback

Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event

System for transporting substrate carriers

Methods and apparatus for identifying small lot size substrate carriers

System for transporting substrate carriers

Transport system

Dual robot including spaced upper arms and interleaved wrists and systems and methods including same

SHAH VINAY K

Methods and loadport for purging a substrate carrier

Methods and apparatus for transporting substrate carriers

Methods and loadport apparatus for purging a substrate carrier

KREMERMAN IZYA

Robot systems, apparatus and methods for transporting substrates

Systems, apparatus and methods for transporting substrates

APPLIED MATERIAL INC

Methods and apparatus for transporting substrate carriers

BRODINE JEFFREY A

Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing

BRECOFLEX CO LLC

Suspension track belt

HUDGENS JEFFREY C

End effector for a cluster tool