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Inventor
WILLHOFF MICHAEL
US
2 patents
⚠️ This page may combine multiple inventors who share the name “WILLHOFF MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
1 patent
US8916061B2
Dec 23, 2014
CMP compositions selective for oxide and nitride with high removal rate and low defectivity
CABOT MICROELECTRONICS CORP
4 citations
66
CMC MAT INC
1 patent
US12116502B2
Oct 15, 2024
Self-stopping polishing composition and method for high topological selectivity
CMC MAT INC
0 citations
53