Inventor
RICE MICHAEL ROBERT
US28 patents
⚠️ This page may combine multiple inventors who share the name “RICE MICHAEL ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS7234584B2Jun 26, 2007
System for transporting substrate carriers
APPLIED MATERIALS INC86 citations98
US7243003B2Jul 10, 2007
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC65 citations97
US7409263B2Aug 5, 2008
Methods and apparatus for repositioning support for a substrate carrier
APPLIED MATERIALS INC44 citations96
US7527141B2May 5, 2009
System for transporting substrate carriers
APPLIED MATERIALS INC20 citations93
US7792608B2Sep 7, 2010
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC21 citations92
US7359767B2Apr 15, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC33 citations92
US7346431B2Mar 18, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
APPLIED MATERIALS INC27 citations92
US7258520B2Aug 21, 2007
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
APPLIED MATERIALS INC34 citations90
US6582175B2Jun 24, 2003
Robot for handling semiconductor wafers
APPLIED MATERIALS INC26 citations90
US9717147B2Jul 25, 2017
Electronic device manufacturing system
APPLIED MATERIALS INC5 citations84
US7673735B2Mar 9, 2010
System for transporting substrate carriers
APPLIED MATERIALS INC15 citations84
US7506746B2Mar 24, 2009
System for transporting substrate carriers
APPLIED MATERIALS INC12 citations84
US9147592B2Sep 29, 2015
Linked vacuum processing tools and methods of using the same
APPLIED MATERIALS INC13 citations80
US11631605B2Apr 18, 2023
Sealed substrate carriers and systems and methods for transporting substrates
APPLIED MATERIALS INC2 citations73
US11576264B2Feb 7, 2023
Electronic device manufacturing system
APPLIED MATERIALS INC2 citations73
US10595415B2Mar 17, 2020
Electronic device manufacturing system
APPLIED MATERIALS INC3 citations73
US7914248B2Mar 29, 2011
Methods and apparatus for repositioning support for a substrate carrier
APPLIED MATERIALS INC3 citations63
US12274007B2Apr 8, 2025
Electronic device manufacturing system
APPLIED MATERIALS INC0 citations62
US11087998B2Aug 10, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US10971381B2Apr 6, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US11990358B2May 21, 2024
Sealed substrate carriers and systems and methods for transporting substrates
APPLIED MATERIALS INC0 citations53
US10553469B2Feb 4, 2020
Sealed substrate carriers and systems and methods for transporting substrates
APPLIED MATERIALS INC0 citations52
US9905447B2Feb 27, 2018
Sealed substrate carriers and systems and methods for transporting substrates
APPLIED MATERIALS INC0 citations52
US10847391B2Nov 24, 2020
Semiconductor device manufacturing platform with single and twinned processing chambers
APPLIED MATERIALS INC0 citations42