Inventor

FUJIMORI MASAKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “FUJIMORI MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7927066B2Apr 19, 2011

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

TOKYO ELECTRON LTD8 citations82

MORIYA TSUYOSHI

1 patent

US8727708B2May 20, 2014

Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component

MORIYA TSUYOSHI1 citations60