Inventor
TAN LUN-KUANG
TW35 patents
Patents
35 patentsUS9577102B1Feb 21, 2017
Method of forming gate and finFET
TAIWAN SEMICONDUCTOR MFG CO LTD18 citations91
US10763168B2Sep 1, 2020
Semiconductor structure with doped via plug and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US11222805B2Jan 11, 2022
Etching apparatus and methods of cleaning thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10347720B2Jul 9, 2019
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11145751B2Oct 12, 2021
Semiconductor structure with doped contact plug and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations72
US11901442B2Feb 13, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11515206B2Nov 29, 2022
Semiconductor structure with doped via plug
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12520545B2Jan 6, 2026
Semiconductor device with offset source/drain regions and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12518976B2Jan 6, 2026
Nitride-containing STI liner for SIGE channel
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080582B2Sep 3, 2024
Etching apparatus and methods of cleaning thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12046479B2Jul 23, 2024
Nitride-containing STI liner for SiGe channel
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12015055B2Jun 18, 2024
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11742386B2Aug 29, 2023
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11532485B2Dec 20, 2022
Process for making multi-gate transistors and resulting structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11450741B2Sep 20, 2022
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12197131B2Jan 14, 2025
Method for reducing line-end space in integrated circuit patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11677015B2Jun 13, 2023
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11635695B2Apr 25, 2023
Method for reducing line-end space in integrated circuit patterning
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11469108B2Oct 11, 2022
System, semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10950694B2Mar 16, 2021
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12308369B2May 20, 2025
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11908740B2Feb 20, 2024
Semiconductor structure with doped via plug
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12166127B1Dec 10, 2024
Semiconductor device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11855092B2Dec 26, 2023
Semiconductor device and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12288715B2Apr 29, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10854471B2Dec 1, 2020
Process for making multi-gate transistors and resulting structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10361094B2Jul 23, 2019
Process for making multi-gate transistors and resulting structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10177006B2Jan 8, 2019
Process for making multi-gate transistors and resulting structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12084762B2Sep 10, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10062787B2Aug 28, 2018
FinFET
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11631612B2Apr 18, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10522631B2Dec 31, 2019
Contact silicide having a non-angular profile
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10032876B2Jul 24, 2018
Contact silicide having a non-angular profile
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10115639B2Oct 30, 2018
FinFET device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations42
US9697989B2Jul 4, 2017
Method for generating parameter pattern, ion implantation method and feed forward semiconductor manufacturing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41