Inventor

SON WOONGKYU

KR2 patents

Patents

2 patents

US9360308B2Jun 7, 2016

Methods for measuring a thickness of an object

SAMSUNG ELECTRONICS CO LTD0 citations41

US10198827B2Feb 5, 2019

Inspection method and system and a method of inspecting a semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations33