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Inventor
BHARADWAJ VAIDYA
US
2 patents
⚠️ This page may combine multiple inventors who share the name “BHARADWAJ VAIDYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
1 patent
US10304668B2
May 28, 2019
Localized process control using a plasma system
TOKYO ELECTRON LTD
46 citations
90
LUONG VINH HOANG
1 patent
US8501628B2
Aug 6, 2013
Differential metal gate etching process
LUONG VINH HOANG
2 citations
59