Inventor

KLAASSEN MICHEL FRANÇOIS HUBERT

NL3 patents

⚠️ This page may combine multiple inventors who share the name “KLAASSEN MICHEL FRANÇOIS HUBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLAASSEN MICHEL FRANÇOIS HUBERT

2 patents

US8958053B2Feb 17, 2015

Lithographic apparatus and alignment method

KLAASSEN MICHEL FRANÇOIS HUBERT1 citations39

US8730454B2May 20, 2014

EUV radiation source and method of generating EUV radiation

KLAASSEN MICHEL FRANÇOIS HUBERT0 citations36

ASML NETHERLANDS BV

1 patent

US9170498B2Oct 27, 2015

Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor

ASML NETHERLANDS BV0 citations49