Inventor

MEHTA SOHAN

US2 patents

⚠️ This page may combine multiple inventors who share the name “MEHTA SOHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEHTA SOHAN

1 patent

US8932961B2Jan 13, 2015

Critical dimension and pattern recognition structures for devices manufactured using double patterning techniques

MEHTA SOHAN5 citations60

GLOBALFOUNDRIES INC

1 patent

US9171735B2Oct 27, 2015

Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenches

GLOBALFOUNDRIES INC1 citations47