Inventor
KENT MARTIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “KENT MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7651583B2Jan 26, 2010
Processing system and method for treating a substrate
TOKYO ELECTRON LTD558 citations97
US7718032B2May 18, 2010
Dry non-plasma treatment system and method of using
TOKYO ELECTRON LTD8 citations82
US11745202B2Sep 5, 2023
Dry non-plasma treatment system
TOKYO ELECTRON LTD0 citations61
US9115429B2Aug 25, 2015
Dry non-plasma treatment system and method of using
TOKYO ELECTRON LTD0 citations50