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Inventor
HENDRIX JAMES LEE
US
2 patents
⚠️ This page may combine multiple inventors who share the name “HENDRIX JAMES LEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
1 patent
US7154607B2
Dec 26, 2006
Flat spectrum illumination source for optical metrology
THERMA WAVE INC
8 citations
70
US ENERGY
1 patent
US6229645B1
May 8, 2001
Polarization selecting optical element using a porro prism incorporating a thin film polarizer in a single element
US ENERGY
9 citations
65