Inventor · disambiguated record

Ching Chin Lai

Also filed as: LAI CHING CHIN

1 granted patent·2 citations·filing 2004–2004

18Inventor score

Technology areasH10P

Files withIND TECH RES INST1

Top patents by PatentIndex Score

1 record

0137US7052826B2Monitoring method, process and system for photoresist regenerationIND TECH RES INST·Filed 2004·Granted May 30, 2006·2 cites·16 claims

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