Inventor

JOHNSTON STEVEN H

US3 patents

⚠️ This page may combine multiple inventors who share the name “JOHNSTON STEVEN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US7129159B2Oct 31, 2006

Integrated dual damascene RIE process with organic patterning layer

IBM23 citations89

US7368393B2May 6, 2008

Chemical oxide removal of plasma damaged SiCOH low k dielectrics

IBM5 citations71

AMERICA WILLIAM G

1 patent

US8106485B2Jan 31, 2012

Chemical oxide removal of plasma damaged SiCOH low k dielectrics

AMERICA WILLIAM G1 citations43