Inventor

STEPANOV ANDREY

KR3 patents

⚠️ This page may combine multiple inventors who share the name “STEPANOV ANDREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US11262591B2Mar 1, 2022

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

KLA TENCOR CORP2 citations67

KLA CORP

1 patent

US11921297B2Mar 5, 2024

System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution

KLA CORP0 citations57

HEWLETT PACKARD DEVELOPMENT CO

1 patent

US11340880B2May 24, 2022

Application management service including package file

HEWLETT PACKARD DEVELOPMENT CO0 citations44