Inventor
Ushimaru Koji
JP3 patents
Patents
3 patentsUS11798821B2Oct 24, 2023
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD2 citations63
US11049758B2Jun 29, 2021
Substrate placing apparatus and substrate placing method
TOKYO ELECTRON LTD1 citations53
US12578650B2Mar 17, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations46