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Inventor
MCGRATH BRETT E
US
2 patents
Patents
2 patents
US6857947B2
Feb 22, 2005
Advanced chemical mechanical polishing system with smart endpoint detection
ASM NUTOOL INC
43 citations
90
US6926589B2
Aug 9, 2005
Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing
ASM NUTOOL INC
0 citations
49