Inventor
KIM KYO BONG
KR2 patents
Patents
2 patentsUS12243727B2Mar 4, 2025
Substrate processing apparatus including electrostatic chuck, substrate processing method, and method of manufacturing electrostatic chuck
SEMES CO LTD0 citations53
US12444977B2Oct 14, 2025
Wireless power apparatus for substrates treating apparatus and manufacturing method of wireless power apparatus for substrate treating apparatus
SEMES CO LTD0 citations44